Repair of porous MSQ (p-MSQ) films using monochlorosilanes dissolved in supercritical Co₂

Keyphrases

• Dielectric Constant 100%
• Supercritical CO2 (SCO2) 100%
• Monochlorosilane 100%
• Fourier Transform Infrared Spectroscopy (FT-IR) 66%
• Chain Length 66%
• Blanket 66%
• Carbon Atom 66%
• Hydrophobicity 33%
• Electrical Measurements 33%
• Mesoporous 33%
• Rinsing 33%
• Surface Properties 33%
• Contact Angle Measurement 33%
• Contact Angle 33%
• Alkyl Chain 33%
• Dielectric Surface 33%
• Supercritical Carbon Dioxide 33%
• Physisorbed 33%
• Self-condensation 33%
• Silanol Groups 33%
• Metal-insulator-metal Capacitor 33%
• Ashing 33%
• Constant Property 33%
• Pore Sealing 33%

Material Science

• Film 100%
• Permittivity 100%
• Contact Angle 66%
• Fourier Transform Infrared Spectroscopy 33%
• Carbon Dioxide 33%
• Hydrophobicity 33%
• Capacitor 33%
• Surface Property 33%