Set-membership estimation for weakly nonlinear models: An application to the adaptive control of semiconductor manufacturing processes

Konstantinos Tsakalis; Lijuan Song

Set-membership estimation for weakly nonlinear models: An application to the adaptive control of semiconductor manufacturing processes

Konstantinos Tsakalis
, Lijuan Song

Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

8 Scopus citations

Abstract

In this paper we consider an application of set-membership concepts to the parameter estimation problem for weakly nonlinear models. We develop a recursive algorithm that, given input-output data, a bound on the measurement noise and a local bound on the Hessian of the nonlinear model with respect to the unknown parameters, produces a consistent ellipsoid containing the `actual' model parameters. To illustrate the use of this algorithm, we consider the process of oxidation of silicon in dry oxygen where the oxidation time is determined by means of a simple adaptive controller. In an effort to reduce the parametric uncertainty, we employ an auxiliary set-membership estimator to update the set of parameter constraints on-line and, thus, avoid unnecessary drifts of the adaptive controller parameters.

Original language	English (US)
Title of host publication	Proceedings of the IEEE Conference on Decision and Control
Publisher	IEEE
Pages	1066-1071
Number of pages	6
Volume	2
State	Published - 1994
Event	Proceedings of the 33rd IEEE Conference on Decision and Control. Part 1 (of 4) - Lake Buena Vista, FL, USA Duration: Dec 14 1994 → Dec 16 1994

Other

Other	Proceedings of the 33rd IEEE Conference on Decision and Control. Part 1 (of 4)
City	Lake Buena Vista, FL, USA
Period	12/14/94 → 12/16/94

ASJC Scopus subject areas

Chemical Health and Safety
Control and Systems Engineering
Safety, Risk, Reliability and Quality

Cite this

Tsakalis, K & Song, L 1994, Set-membership estimation for weakly nonlinear models: An application to the adaptive control of semiconductor manufacturing processes. in Proceedings of the IEEE Conference on Decision and Control. vol. 2, IEEE, pp. 1066-1071, Proceedings of the 33rd IEEE Conference on Decision and Control. Part 1 (of 4), Lake Buena Vista, FL, USA, 12/14/94.

@inproceedings{6cbb81e655a64c6e98e02ec2e5eba161,

title = "Set-membership estimation for weakly nonlinear models: An application to the adaptive control of semiconductor manufacturing processes",

abstract = "In this paper we consider an application of set-membership concepts to the parameter estimation problem for weakly nonlinear models. We develop a recursive algorithm that, given input-output data, a bound on the measurement noise and a local bound on the Hessian of the nonlinear model with respect to the unknown parameters, produces a consistent ellipsoid containing the `actual' model parameters. To illustrate the use of this algorithm, we consider the process of oxidation of silicon in dry oxygen where the oxidation time is determined by means of a simple adaptive controller. In an effort to reduce the parametric uncertainty, we employ an auxiliary set-membership estimator to update the set of parameter constraints on-line and, thus, avoid unnecessary drifts of the adaptive controller parameters.",

author = "Konstantinos Tsakalis and Lijuan Song",

year = "1994",

language = "English (US)",

volume = "2",

pages = "1066--1071",

booktitle = "Proceedings of the IEEE Conference on Decision and Control",

publisher = "IEEE",

note = "Proceedings of the 33rd IEEE Conference on Decision and Control. Part 1 (of 4) ; Conference date: 14-12-1994 Through 16-12-1994",

}

TY - GEN

T1 - Set-membership estimation for weakly nonlinear models

T2 - Proceedings of the 33rd IEEE Conference on Decision and Control. Part 1 (of 4)

AU - Tsakalis, Konstantinos

AU - Song, Lijuan

PY - 1994

Y1 - 1994

N2 - In this paper we consider an application of set-membership concepts to the parameter estimation problem for weakly nonlinear models. We develop a recursive algorithm that, given input-output data, a bound on the measurement noise and a local bound on the Hessian of the nonlinear model with respect to the unknown parameters, produces a consistent ellipsoid containing the `actual' model parameters. To illustrate the use of this algorithm, we consider the process of oxidation of silicon in dry oxygen where the oxidation time is determined by means of a simple adaptive controller. In an effort to reduce the parametric uncertainty, we employ an auxiliary set-membership estimator to update the set of parameter constraints on-line and, thus, avoid unnecessary drifts of the adaptive controller parameters.

AB - In this paper we consider an application of set-membership concepts to the parameter estimation problem for weakly nonlinear models. We develop a recursive algorithm that, given input-output data, a bound on the measurement noise and a local bound on the Hessian of the nonlinear model with respect to the unknown parameters, produces a consistent ellipsoid containing the `actual' model parameters. To illustrate the use of this algorithm, we consider the process of oxidation of silicon in dry oxygen where the oxidation time is determined by means of a simple adaptive controller. In an effort to reduce the parametric uncertainty, we employ an auxiliary set-membership estimator to update the set of parameter constraints on-line and, thus, avoid unnecessary drifts of the adaptive controller parameters.

UR - https://www.scopus.com/pages/publications/0028738397

UR - https://www.scopus.com/pages/publications/0028738397#tab=citedBy

M3 - Conference contribution

VL - 2

SP - 1066

EP - 1071

BT - Proceedings of the IEEE Conference on Decision and Control

PB - IEEE

Y2 - 14 December 1994 through 16 December 1994

ER -

Set-membership estimation for weakly nonlinear models: An application to the adaptive control of semiconductor manufacturing processes

Abstract

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ASJC Scopus subject areas

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