Shock mitigated micro-electromechanical systems structure

Ang Chen; Suhyun Nam; Ying Cheng Lai; Junseok Chae

doi:10.31438/trf.hh2016.123

Shock mitigated micro-electromechanical systems structure

Ang Chen, Suhyun Nam, Ying Cheng Lai, Junseok Chae

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We report a simple, yet effective, MEMS structure to mitigate the external mechanical perturbation, such as shock. A conventional single membrane can travel beyond allowed distance to be damaged upon an external shock. The excessive travel can be reduced by having an additional electrode to attract the membrane electrostatically. The added elements, in conjunction with fine control algorithm, mitigate the impact of shock. The dual membrane structure effectively reduces the travel distance by 37 %, upon deploying merely 0.5 V. The dynamic implementation of shock mitigation method, using an on-board accelerometer together, delivered successful in-situ mitigation of shock on a dual-membrane MEMS microphone.

Original language	English (US)
Title of host publication	2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016
Editors	Mark G. Allen, Tina Lamers
Publisher	Transducer Research Foundation
Pages	458-459
Number of pages	2
ISBN (Electronic)	9781940470023
DOIs	https://doi.org/10.31438/trf.hh2016.123
State	Published - 2016
Event	2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016 - Hilton Head, United States Duration: Jun 5 2016 → Jun 9 2016

Publication series

Name	2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016

Conference

Conference	2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016
Country/Territory	United States
City	Hilton Head
Period	6/5/16 → 6/9/16

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

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10.31438/trf.hh2016.123

Cite this

Chen, A., Nam, S., Lai, Y. C., & Chae, J. (2016). Shock mitigated micro-electromechanical systems structure. In M. G. Allen, & T. Lamers (Eds.), 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016 (pp. 458-459). (2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016). Transducer Research Foundation. https://doi.org/10.31438/trf.hh2016.123

Shock mitigated micro-electromechanical systems structure. / Chen, Ang; Nam, Suhyun; Lai, Ying Cheng et al.
2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016. ed. / Mark G. Allen; Tina Lamers. Transducer Research Foundation, 2016. p. 458-459 (2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Chen, A, Nam, S, Lai, YC & Chae, J 2016, Shock mitigated micro-electromechanical systems structure. in MG Allen & T Lamers (eds), 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016. 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016, Transducer Research Foundation, pp. 458-459, 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016, Hilton Head, United States, 6/5/16. https://doi.org/10.31438/trf.hh2016.123

@inproceedings{9801ab88187545168b41757d300135f9,

title = "Shock mitigated micro-electromechanical systems structure",

abstract = "We report a simple, yet effective, MEMS structure to mitigate the external mechanical perturbation, such as shock. A conventional single membrane can travel beyond allowed distance to be damaged upon an external shock. The excessive travel can be reduced by having an additional electrode to attract the membrane electrostatically. The added elements, in conjunction with fine control algorithm, mitigate the impact of shock. The dual membrane structure effectively reduces the travel distance by 37 %, upon deploying merely 0.5 V. The dynamic implementation of shock mitigation method, using an on-board accelerometer together, delivered successful in-situ mitigation of shock on a dual-membrane MEMS microphone.",

author = "Ang Chen and Suhyun Nam and Lai, {Ying Cheng} and Junseok Chae",

note = "Funding Information: The authors appreciate the support from National Science Foundation (EPDT-1101797). Publisher Copyright: {\textcopyright} 2016 TRF; 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016 ; Conference date: 05-06-2016 Through 09-06-2016",

year = "2016",

doi = "10.31438/trf.hh2016.123",

language = "English (US)",

series = "2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016",

publisher = "Transducer Research Foundation",

pages = "458--459",

editor = "Allen, {Mark G.} and Tina Lamers",

booktitle = "2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016",

}

TY - GEN

T1 - Shock mitigated micro-electromechanical systems structure

AU - Chen, Ang

AU - Nam, Suhyun

AU - Lai, Ying Cheng

AU - Chae, Junseok

PY - 2016

Y1 - 2016

N2 - We report a simple, yet effective, MEMS structure to mitigate the external mechanical perturbation, such as shock. A conventional single membrane can travel beyond allowed distance to be damaged upon an external shock. The excessive travel can be reduced by having an additional electrode to attract the membrane electrostatically. The added elements, in conjunction with fine control algorithm, mitigate the impact of shock. The dual membrane structure effectively reduces the travel distance by 37 %, upon deploying merely 0.5 V. The dynamic implementation of shock mitigation method, using an on-board accelerometer together, delivered successful in-situ mitigation of shock on a dual-membrane MEMS microphone.

AB - We report a simple, yet effective, MEMS structure to mitigate the external mechanical perturbation, such as shock. A conventional single membrane can travel beyond allowed distance to be damaged upon an external shock. The excessive travel can be reduced by having an additional electrode to attract the membrane electrostatically. The added elements, in conjunction with fine control algorithm, mitigate the impact of shock. The dual membrane structure effectively reduces the travel distance by 37 %, upon deploying merely 0.5 V. The dynamic implementation of shock mitigation method, using an on-board accelerometer together, delivered successful in-situ mitigation of shock on a dual-membrane MEMS microphone.

UR - http://www.scopus.com/inward/record.url?scp=85071415138&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85071415138&partnerID=8YFLogxK

U2 - 10.31438/trf.hh2016.123

DO - 10.31438/trf.hh2016.123

M3 - Conference contribution

T3 - 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016

SP - 458

EP - 459

BT - 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016

A2 - Allen, Mark G.

A2 - Lamers, Tina

PB - Transducer Research Foundation

T2 - 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016

Y2 - 5 June 2016 through 9 June 2016

ER -

Shock mitigated micro-electromechanical systems structure

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