Super-Resolution by Combination of a Solid Immersion Lens and an Aperture

Tom D. Milster; Farhad Akhavan; Melissa Bailey; J. Kevin Erwin; David M. Felix; Kusato Hirota; Steven Koester; Kei Shimura; Yan Zhang

doi:10.1143/jjap.40.1778

Super-Resolution by Combination of a Solid Immersion Lens and an Aperture

Tom D. Milster, Farhad Akhavan, Melissa Bailey, J. Kevin Erwin, David M. Felix, Kusato Hirota, Steven Koester, Kei Shimura, Yan Zhang

Research output: Contribution to journal › Article › peer-review

25 Scopus citations

Abstract

A solid immersion lens is combined with various aperture shapes in order to improve resolution. Both metallic and dielectric apertures are investigated, and optimum shapes for each are determined. Fabrication techniques for each type of combination probe are discussed and implemented, and a simple experiment with a dielectric combination probe scanning a reflective grating demonstrates improved resolution compared to a solid immersion lens alone.

Original language	English (US)
Pages (from-to)	1778-1782
Number of pages	5
Journal	Japanese Journal of Applied Physics, Part 2: Letters
Volume	40
Issue number	3 B
DOIs	https://doi.org/10.1143/jjap.40.1778
State	Published - 2001

Keywords

Near-field optics
Optical data storage
Solid immersion lens
Super resolution

ASJC Scopus subject areas

General Engineering
General Physics and Astronomy

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10.1143/jjap.40.1778

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abstract = "A solid immersion lens is combined with various aperture shapes in order to improve resolution. Both metallic and dielectric apertures are investigated, and optimum shapes for each are determined. Fabrication techniques for each type of combination probe are discussed and implemented, and a simple experiment with a dielectric combination probe scanning a reflective grating demonstrates improved resolution compared to a solid immersion lens alone.",

keywords = "Near-field optics, Optical data storage, Solid immersion lens, Super resolution",

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T1 - Super-Resolution by Combination of a Solid Immersion Lens and an Aperture

AU - Milster, Tom D.

AU - Akhavan, Farhad

AU - Bailey, Melissa

AU - Kevin Erwin, J.

AU - Felix, David M.

AU - Hirota, Kusato

AU - Koester, Steven

AU - Shimura, Kei

AU - Zhang, Yan

PY - 2001

Y1 - 2001

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AB - A solid immersion lens is combined with various aperture shapes in order to improve resolution. Both metallic and dielectric apertures are investigated, and optimum shapes for each are determined. Fabrication techniques for each type of combination probe are discussed and implemented, and a simple experiment with a dielectric combination probe scanning a reflective grating demonstrates improved resolution compared to a solid immersion lens alone.

KW - Near-field optics

KW - Optical data storage

KW - Solid immersion lens

KW - Super resolution

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JF - Japanese Journal of Applied Physics, Part 2: Letters

IS - 3 B

ER -

Super-Resolution by Combination of a Solid Immersion Lens and an Aperture

Abstract

Keywords

ASJC Scopus subject areas

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