@inproceedings{17d195ebf521422db55c478d3b8fefbf,
title = "Surface figure metrology based on geometric phase components",
abstract = "A geometric phase component is very attractive in optical metrology because its meta-surface characteristic enables traditional optical systems to be more compact and multi-functional. In this presentation, we introduce two types of geometric phase components, i.e. a geometric phase lens and a polarization grating in surface figure metrology. Their features of polarized beam splitting and phase retardation play a role of wavefront shearing device, and simple shearing interferometers can be designed. We focus on the instrumentation of a radial shearing interferometer using a geometric phase lens and a lateral shearing interferometer based on a polarization grating. With the aid of a polarization pixelated CMOS camera, each interferometer can provide the phase map corresponding to the sheared wavefront as a snapshot measurement. In the experiment, various wavefronts generated by a deformable mirror and shapes of several mirrors were measured and compared with other commercial devices.",
keywords = "Geometric phase, lateral shearing interferometer, radial shearing interferometer, surface figure, wavefront",
author = "Joo, {K. N.} and Park, {H. M.} and Jeong, {H. B.} and Guthery, {C. E.} and D. Kim and Ghim, {Y. S.}",
note = "Publisher Copyright: {\textcopyright} 2022 SPIE; Optics and Photonics for Advanced Dimensional Metrology II 2022 ; Conference date: 09-05-2022 Through 20-05-2022",
year = "2022",
doi = "10.1117/12.2624872",
language = "English (US)",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "{de Groot}, {Peter J.} and Leach, {Richard K.} and Pascal Picart",
booktitle = "Optics and Photonics for Advanced Dimensional Metrology II",
}