SURFACE FIGURE METROLOGY BASED ON GEOMETRIC PHASE COMPONENTS

Hyo Mi Park, Hyo Bin Jeong, Young Sik Ghim, Daewook Kim, Charlotte E. Guthery, Ki Nam Joo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publication2023 ASPE Winter Topical Meeting
Subtitle of host publicationPrecision Optical Metrology Workshop
PublisherAmerican Society for Precision Engineering, ASPE
Pages26-29
Number of pages4
ISBN (Electronic)9781713870876
StatePublished - 2023
Event2023 ASPE Winter Topical Meeting: Precision Optical Metrology Workshop - Tucson, United States
Duration: Mar 6 2023Mar 7 2023

Publication series

Name2023 ASPE Winter Topical Meeting: Precision Optical Metrology Workshop

Conference

Conference2023 ASPE Winter Topical Meeting: Precision Optical Metrology Workshop
Country/TerritoryUnited States
CityTucson
Period3/6/233/7/23

ASJC Scopus subject areas

  • Mechanical Engineering

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