THERMALLY INDUCED MICRO-DEFECTS IN CZ SILICON: A HIGH RESOLUTION ELECTRON MICROSCOPY STUDY.

F. A. Ponce, S. Hahn, T. Yamashita, M. Scott, J. R. Carruthers

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Scopus citations
Original languageEnglish (US)
Title of host publicationInstitute of Physics Conference Series
PublisherInst of Physics
Pages65-70
Number of pages6
Edition67
ISBN (Print)0854981586
StatePublished - 1983
Externally publishedYes

Publication series

NameInstitute of Physics Conference Series
Number67

ASJC Scopus subject areas

  • General Physics and Astronomy

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