Vector polynomials for gradient metrology data processing

Maham Aftab, Dae Wook Kim

Research output: Contribution to journalConference articlepeer-review

Abstract

We discuss the advantages of vector polynomials for wavefront / surface reconstruction from gradient data. The Chebyshev-based G polynomials allow accurate and efficient reconstruction of mid-to-high spatial frequencies particularly where traditional integrations approaches could be problematic.

Original languageEnglish (US)
Article numberOW3B.1
JournalOptics InfoBase Conference Papers
StatePublished - 2021
EventOptical Fabrication and Testing, OFT 2021 - Part of OSA Optical Design and Fabrication 2021 - Virtual, Online, United States
Duration: Jun 27 2021Jul 1 2021

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

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